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Synthesis and Characterization of Volatile Liquid Cobalt Amidinates as ALD Molecular Sources

등록일
2009년 8월 14일 15시 20분 36초
접수번호
1174
발표코드
34P214포 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
발표시간
목 <발표Ⅰ>
발표형식
포스터
발표분야
물리화학
저자 및
공동저자
강동인, 차현길, 강영수
서강대학교 화학과, Korea
Cobalt metal are promising in many areas of technology including magnetic information storage, computer chips and catalysis. Volatile cobalt amidinate compound cobalt bis(N,N’-Diisopropylacetamidinate was synthesized. It was characterized by several analytical methods in order to elucidate its structure with single-crystal X-ray diffraction, 1H NMR and FT-IR, optical properties with UV-vis absorption spectroscopy and thermal behavior with thermogravimetric analysis. They are highly reactive compounds that have been found to be suitable precursors for vapor deposition of cobalt metal, cobalt nitride and cobalt oxide. Preliminary atomic layer deposition (ALD) experiments highlight its very promising features as a atomic layer deposition molecular source for cobalt oxide nanosystems.

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