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  • 09월 04일 13시 이후 : 초록수정 불가능, 일정확인 및 검색만 가능

Laser Ablation ICP-MS for Metallomics and Microelectronic Analysis

2009년 9월 9일 14시 29분 43초
목12E2심 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
목 14시 : 30분
분석화학 - New Frontiers in Analytical Chemistry
저자 및
H. B. Lim, Hansem Choi, S. K. Ma, J. Y. Chu
Department of Chemistry, Dankook University, 126 Jukjeon-dong, Suji-gu, Yongin-si, Gyeonggi-do, 448-701, Korea, Korea
In our lab, several approaches are in progress for nano scale sampling in ICP-MS, for example, nano size separation and concentration of metal ions in microchip channel with surface modified magnetic beads. For direct analysis for semiconductor or liquid bio samples with limited sample volume, surface modified PDMS array microchip was developed for accurate and fast calibration and demonstrated the determination of heavy metals for quantification using 213 nm laser coupled with ICP-MS. The microarray chip sampling technique was applied to determine metal impurites in photoresist (PR) used in semiconductor manufacturing process was performed to achieve fast analysis with high sensitivity and to reduce analytical cost. For application to not only PR but some bio samples, such as blood and urine, Al, Tl, and Pb showed excellent linearity. This developed microchip sampling was expected to provide several significant advantages, such as reliable ablation, high throughput, convenient sample preparation and loading for standard addition, and low cost due to no use of wafers.