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대한화학회 제105회 학술발표회 및 총회 The Formation of Hybrid Organic-Inorganic Zincone Thin Films by Molecular Layer Deposition through three sequential reaction steps

등록일
2010년 2월 17일 11시 19분 16초
접수번호
0287
발표코드
39P203포 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
발표시간
금 <발표Ⅳ>
발표형식
포스터
발표분야
재료화학
저자 및
공동저자
조성권, 이성훈
서울대학교 화학부, Korea
Hybrid organic-inorganic thin films were grown by molecular layer deposition. Molecular layer deposition (MLD) similar to atomic layer deposition (ALD) is a sequential, self-terminating growth process. In the growth of hybrid organic-inorganic thin films, we used diethyl zinc(DEZ), ethanolamine(EN), and vinylene carbonate(VC) as reactants. An MLD consists of three sequential steps: in the first step, ethyl zinc is pulsed onto a substrate and then its remnant is removed by a purging Ar, in the second step, ethanolamine (EN) is pulsed onto the substrate and then is removed by a purging Ar, in the third step, vinylene carbonate (VC) as a ring-opening reactant is pulsed onto the substrate and later is removed by a purging Ar. As like alucone polymers of the form (-O-Al-O-R-)n, the resulting hybrid organic-inorganic thin film is an Zincone with the form (-Zn-OCH 2CH 2NH-C(O)OCHCHO-)n. We characterized the composition, thickness, and structural image of the Zircone thin film using ex-situ FTIR spectroscopy, ellipsometry, and transmission electron microscopy, respectively. These results demonstrate that an MLD is an ideal method to fabricate hybrid organic-inorganic thin films that can be useful in various flexible electronic devices.

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