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  • 09월 06일 15시 이후 : 초록수정 불가능, 일정확인 및 검색만 가능

제112회 대한화학회 학술발표회, 총회 및 기기전시회 안내 Redistribution Reaction of Trichlorosilane to Dichlorosilane

2013년 8월 20일 13시 23분 57초
IND.P-66 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
10월 16일 (수요일) 16:00~19:00
저자 및
이동원, 한준수1, 이명의2, 유복렬1,*
연세대학교 화학과, Korea
1한국과학기술연구원(KIST) 물질구조제어연구단, Korea
2연세대학교 화학및의화학과, Korea
Silane (SiH4) is one of the most important starting materials used for producing high pure polycrystalline silicon. The quality of semiconducting silicon is mainly determined by the purity of silane. The best method to prepare ultra-high grade silane is distillation, because the boiling point of silane is lower than those of all chlorosilanes and impurities such as chlorides and hydrides of boron, phosphorus, and arsenic. The silane can be obtained by redistribution of trichlorosilane in promising method for it.??According to the literature?the best catalyst for the disproportionation of trichlorosilane are ion-exchange resins combining catalytic active functional group such as tertiary amine or quaternary ammonium group. New type catalyst system containing a heterocyclic base, such as pyrrolidine, piperidine, as functional group at polystyrene resin were synthesized. And then the redistribution activity of the synthesized catalysts was tested under various conditions (reaction temperature, contact time) and compared with five commercial ion-exchange resins, such as amberlyst A21, amberlite IRA-400. Among the commercial catalysts, the Amberlyst A21 catalyst in the best catalyst for the redistribution. In the presentation we will discuss about catalytic activity of several commercial ion-exchange resins and new catalyst system.