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제114회 대한화학회 학술발표회, 총회 및 기기전시회 안내 Noble Organic-Inorganic Hybrid Thin Film Fabrication as Encapsulation using TMA and Adipoyl Chloride

등록일
2014년 8월 28일 16시 56분 42초
접수번호
1336
발표코드
PHYS.P-465 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
발표시간
10월 15일 (수요일) 16:00~19:00
발표형식
포스터
발표분야
물리화학
저자 및
공동저자
정진원, 성명모1,*
한양대학교 자연과학대학 화학과, Korea
1한양대학교 화학과, Korea
We fabricate organic-inorganic hybrid thin film for the purpose of encapsulation by molecular layer deposition(MLD) using Trimethylaluminium(TMA) and Adipoyl Chloride(AC). Molecular layer deposition (MLD) is a gas-phase process analogous to ALD and also relies on sequential saturated surface reactions In the MLD method, the high quality organic thin films can be quickly formed with monolayer precision under ALD conditions (temperature, pressure, etc). We found that desirable organic thin film fabrication is possible by MLD surface reaction in monolayer scale. Purging was carried out after dosing of each precursor to form monolayer in each sequence. Ellipsometry was employed to verify self-limiting reaction of MLD. Linear relationship between number of cycle and thickness was obtained. We deposit TMA and AC at 70 °C and that 1.78Å root mean square was obtained which indicates that uniform organic thin film was formed. We calculated WVTR of organic-inorganic hybrid super-lattice epitaxial layer using Ca test. WVTR indicates superlattice film can be possibly use as encapsulation in flexible devices.

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