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학술발표회초록보기

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제114회 대한화학회 학술발표회, 총회 및 기기전시회 안내 IR Correlation Spectroscopy using Microgratings to detect target gases

등록일
2014년 9월 1일 14시 56분 55초
접수번호
1397
발표코드
PHYS.P-474 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
발표시간
10월 15일 (수요일) 16:00~19:00
발표형식
포스터
발표분야
물리화학
저자 및
공동저자
최은우, 조충만, 김성규*
성균관대학교 화학과, Korea
For the past couple of years, we have devoted to develop microgratings, each of which can provide a reference IR spectrum of a target gas in the correlation spectroscopy. Each micrograting pattern was designed using a gradient searching error minimization method and a Fraunhofer diffraction equation. It consists of 1441 reflecting lines of 13.323 μm width, whose depths were discretized into 16 levels between 0 and 6.9 μm. The microgratings for SF6, NH3 , and CH3OH were fabricated by a series of etching process using four masks on a silicon wafer in 19.2×19.2 mm2 size. When monitored at 15o angle, each micrograting generated the IR spectrum in good agreement with the reference one. To apply it for the correlation spectroscopy, a 10 cm long gas cell containing a target gas is placed in the middle of the optical path in our micrograing test setup and a broad band IR is introduced. The detected signal changes as the detection angle off the micrograting varies. Particularly at 15o, the signal shows a dip, whose intensity is proportional to the target gas concentration. This is the correlation signal. We have compared the performances, such as signal to noise ratio, of the correlation IR spectroscopy to conventional dispersive transmission IR spectroscopy.

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