KCS

The light emitted from a specimen in response to electron beam irradiation is called cathodoluminescence (CL), and it is possible to use this luminescence to evaluate the physical properties of microscopic areas of the specimen. It can be used for many different purposes, such as observing and evaluating the structures under a surface, evaluating wide-gap materials, and making evaluations about defects and impurities. It is used across a wide range of fields such as semiconductors, oxides, dielectrics, ceramics and living organisms. In addition, as it uses electron beam as a means of excitation, it can be used for complex evaluations in the same location as detection means such as an EBIC or EDS. It uses a field emission electron gun as an excitation source, allowing evaluation with a high spatial resolution of nanometer scale. I introduce CL and CL application including nanomaterials in the meeting.