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제119회 대한화학회 학술발표회, 총회 및 기기전시회 Sequential Growth of Hybrid Organic-Inorganic Zincone Film on Nanostructures by Molecular Layer Deposition [동우화인켐(주) 포스터상]

2017년 2월 1일 11시 05분 02초
INOR.P-50 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
4월 21일 (금요일) 13:00~14:30
저자 및
최의진, 이진석*
숙명여자대학교 화학과, Korea
Molecular layer deposition (MLD) is a method for obtaining conformal ultrathin organic films using vapor-phase organic precursors, while their composition and thickness can be controlled at the molecular level. This process is based on self-saturating reactions between the organic precursors and the substrate surface. Also, in comparison with solution-based technique, it allows epitaxial growth of molecular layer on substrate and is especially good for surface reaction or coating of nanostructures such as nanopore, nanobead, nanowire array and so on. In this study, we fabricated organic-inorganic zincone polymeric films on surfaces with various curvatures through coupling reactions between diethyl zinc (DEZ) and diol with triple bonds as inorganic and organic precursors, respectively, by molecular layer deposition. Using ellipsometry and transmission electron microscope (TEM), we confirmed the different growth rate of the films on nanostructure versus number of MLD cycles at all same temperature. The mass gains in zincone films grown with varying doses of DEZ and organic diol were identified using in situ quartz crystal microbalance (QCM) technique. And, surface potential of zincone films according to the curvature surfaces was investigated by ex situ analysis scanning kelvin probe microscopy (SKPM). Furthermore, all molecular geometries on surfaces with various curvatures were predicted by performing density functional theory (DFT) calculations. Reference [1] J. S. Lee; Y. -J. Lee; E. L. Tae; Y. S. Park; K. B. Yoon, Science, 2003, 301, 818−821. [2] A. A. Dameron; D. Seghete; B. B. Burton; S. D. Davidson; A. S. Cavanagh; J. A. Bertrand; S. M. George, Chem. Mater. 2008, 20, 3315–3326. [3] A. I. Abdulagatov; R. A. Hall; J. L. Sutherland; B. H. Lee; A. S. Cavanagh; S. M. George, Chem. Mater. 2012, 24, 2854−2863. [4] Y.-S. Park, S.-E. Choi, H. Kim, J. S. Lee*, ACS Applied Materials & Interfaces, 2016, 8 (18), 11788–11795. [5] Y.-S. Park, H. Kim, B. Cho, C. Lee, S.-E. Choi, M. M. Sung, J. S. Lee*, ACS Applied Materials & Interfaces, 2016, 8 (27), 17489–17498.