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  • 02월 19일 10시 이후 : 초록수정 불가능, 일정확인 및 검색만 가능

제121회 대한화학회 학술발표회, 총회 및 기기전시회 안내 Synthesis of novel group 4 transition metal complexes

등록일
2018년 2월 2일 18시 34분 14초
접수번호
3582
발표코드
INOR.P-50 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
발표시간
4월 19일 (목요일) 11:00~12:30
발표형식
포스터
발표분야
Inorganic Chemistry
저자 및
공동저자
GAYEON LEE, Bo Keun Park, Chang-Gyoun Kim1, TAEK-MO CHUNG2,*
Center for Thin Film Materials, Korea Research Institute of Chemical Technology, Korea
1Chemical Materials Division, Korea Research Institute of Chemical Technology, Korea
2Chemical Materials Division Center for Thin Film M, Korea Research Institute of Chemical Technology, Korea
In the case of dynamic random access memory (DRAM), capacitor dielectrics have required new dielectric materials with a higher k-value than that of traditional SiO2. HfO2 and ZrO2 have been extensively investigated as the gate dielectric oxide or the capacitor dielectrics. In this work, novel group 4 metal complexes containing amino-alkoxide as stabilizing ligands, were successfully synthesized. The newly synthesized compounds were characterized by FTIR and NMR spectroscopy as well as elemental and thermogravimetric (TG) analysis. The molecular structures of compounds were inspected by single crystal X-ray diffraction, that they crystalized in the monoclinic space group P2(1)/n as monomer.

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