KCS

Glow Discharge Spectrometer (GDS) is a rapid and easy-to-use surface-analysis instrument. Employing the high-frequency glow discharge method, the analyzer enables the surface analysis of non-conductive samples. It also enables analysis of elements H to U. The analyzer allows rapid elemental analysis in the depth direction through Ar sputtering at a velocity of approximately 1 to 10 m/min. In contrast to surface analysis instruments such as XPS, Auger, and SIMS, the analyzer does not require a high vacuum for measurement. To design a thin film device, it is very important to obtain the elemental information on a sample depth. In this study, the experimental parameters for the depth profiling using XPS, AES, and GDS were optimized and compared the results. The film thickness was measured with TEM. Almost same depth resolution(~7 nm) obtained for the analytical tools used this study. The choice of an analytical tool for the depth profiling is highly dependant on the characteristics of the sample; film thickness, conducting property, included elements, etc.