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Characterization and microfabrication of microfluidic channels from preceramic polymer by imprint lithography

등록일
2007년 8월 16일 09시 24분 58초
접수번호
0960
발표코드
29P15포 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
발표시간
금 <발표Ⅲ>
발표형식
포스터
발표분야
공업화학
저자 및
공동저자
민경익, 김동표1
충남대학교 정밀응용화학과,
1충남대학교 공업화학과,
Novel optically transparent materials with solvent resistant and high thermal stability have great potential for a variety of applications in modern technology and engineering, such as microelectromechanical systems (MEMS). SiC is a new class of polymer-derived ceramics whose starting material is a liquid-phase polymer. The main advantage of using preceramic polymer is their convenience in fabrication small and complicated structural features by using near –net shape processing techniques. In this study, we reported on the fabrication of non-oxide ceramic microfluidic channels from preceramic polymers with soft lithographic techniques for the applicable potentials of the photochemical reaction. The preceramic polymer layer of the glass surface was cured by the UV and then thermal methods for complete crosslinking and formation of transparent, solvent resistant microchannels.

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