120th General Meeting of the KCS

Type Poster Presentation
Area Physical Chemistry
Room No. Exhibition Hall 2+3
Time 10월 20일 (금요일) 13:00~14:30
Code PHYS.P-95
Subject Formation of deep chemical bonding between C and Ge in C (C: 1.5 wt.%) doped Ge2Sb2Te5 after phase-change
Authors Young Mi Lee
Beamline Department, Pohang Accelerator Laboratory (PAL), Korea
Abstract

C doped (1.5 wt.%) GST (CGST) thin film was formed on Si substrate by using sputter method with 100 nm-thick and confirmed resistance, atomic structure, and chemical state of CGST. From exploring chemical states of amorphous and crystalline CGST, we found the C-C bonding with cluster structure/Ge-C bonding and the deep double bonding (Ge=C) in amorphous and crystalline phases, respectively. The reverse-relationship between Ge-C and Ge=C bonds in amorphous and crystalline phases is observed in the analysis of chemical states.

E-mail yiymi35@postech.ac.kr