123rd General Meeting of the KCS

Type Poster Presentation
Area Inorganic Chemistry
Room No. Exhibition Hall 2
Time 4월 18일 (목요일) 11:00~12:30
Code INOR.P-24
Subject High purity nanoparticle synthesis of core / shell structure utilizing thermal plasma technology and atomic layer deposition
Authors Jhong Ryul Yoo, Sungho Park1,*
Chemistry, Daejin University, Korea
1Department of Chemistry, Daejin University, Korea
Abstract In this study, an equipment to deposit of high purity nanoparticles with core/shell structure was developed using thermal plasma technology which synthesized and deposited core material (TiO2) on a 6-inch Si substrate to grow uniform thin film of high purity nanoparticle, and the core can be coated a shell material (Al2O3) without external exposure. A torch was constructed to form a stable thermal plasma which was formed by the electromagnetic waves which generated from the magnetron and propagate through the waveguide and was stabilized by the swirl gas, and a gas phase precursor was injected into the torch to deposit the core thin film. In addition, the uniformity of deposition of nanoparticles was improved by constructing a wafer holder capable of adjusting the rotation and height of the substrate. The atomic layer deposition (ALD) technique was used for shell coating of the deposited nanoparticles, and the main transfer line (MTL) was applied for transferring the substrate from the nanoparticle deposition chamber to the ALD chamber without external exposure. In addition, by constructing a pneumatic gate between the two chambers, it is possible to prevent contamination of the ALD chamber by the nanoparticles during the thermal plasma process and to maintain the vacuum state for ALD. The deposited thin film thickness of Core-TiO2 nanoparticles and the coated shell thickness of shell-Al2O3 were analyzed by scanning electron microscope (SEM) and transmission electron microscope (TEM). The growth rate of core-TiO2 thin film was 0.05 μm/s, and the coating rate of shell-Al2O3 was controlled with 1 Ẳ / cycle. The crystal fraction and average particle size of core to the process conditions was analyzed through X-ray diffraction (XRD) and dynamic light scattering system (DLS), and it was confirmed that the anatase/rutile ratio of core-TiO2 crystal structure and average core size was controlled from 0.16 to 3.16 and from 18.8 to 44.8 nm, respectively.
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