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Ceria nanocrystals with cube shape were synthesized from the hydrolytic sol-gel reaction of cerium salt in the presence of oleylamine. The overall synthetic process is very simple and readily applicable to the large scale synthesis of tens of grams in a single reaction under air atmosphere. These ceria nanocrystals are readily dispersible in an aqueous media without adding any extra dispersing agent and the aqueous dispersion of the ceria nanocrystals was successfully applied to CMP slurry, exhibiting high removal selectivity between silicon oxide and silicon nitride at pH 7.
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KCS