KCS

Metal structures show large surface plasmon resonance effect due to its abundant free electrons. In order to generate surface plasmon effects at the visible range, subwavelength metal nanostructures should be provided. However, the conventional methods, such as photolithography or nanosphere lithography method, could only produce limited form of the metal nanostructures. In this study, we developed periodic metal nanostructure transfer method which could be adapted to the various substrates such as SiO2 and polymer layer. These structures have been further employed as metal mask due to its high etching selectivity. With metal nanostructure transfer method, we not only optimized localized surface plasmon resonance at the visible range but also achieved nanopatterned substrate via RIE etching process.