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학술발표회초록보기

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제114회 대한화학회 학술발표회, 총회 및 기기전시회 안내 Encapsulation Layer Fabrication of Organic-Inorganic Hybrid Thin Film by Atomic Layer Deposition and Molecular Layer Deposition

등록일
2014년 8월 28일 16시 44분 21초
접수번호
1291
발표코드
MAT.P-1151 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
발표시간
10월 15일 (수요일) 16:00~19:00
발표형식
포스터
발표분야
재료화학
저자 및
공동저자
김홍범, 성명모*
한양대학교 화학과, Korea
We fabricate organic-inorganic thin film for the purpose of encapsulation by molecular layer deposition(MLD) using Adipoyl Chloride(AC) and 1,4-Butanediamine. Ellipsometry was employed to verify self-limiting reaction of MLD. Linear relationship between number of cycle and thickness was obtained. We found that desirable organic thin film fabrication is possible by MLD surface reaction in monolayer scale. Purging was carried out after dosing of each precursor to form monolayer in each sequence. We also confirmed roughness of the organic thin film by atomic force microscopy(AFM). We deposit AC and 1,4-Butanediamine at 70 °C and investigated surface roughness with increasing thickness of organic thin film. We confirmed precursor’s functional group by IR spectrum. We calculated WVTR of organic-inorganic hybrid super-lattice epitaxial layer using Ca test. WVTR indicates superlattice film can be possibly use as encapsulation in flexible devices.

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