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  • 02월 22일 16시 이후 : 초록수정 불가능, 일정확인 및 검색만 가능

Molecular Layer Deposition of Self-Assembled Organic Multilayers for OTFTs

등록일
2008년 2월 12일 11시 07분 36초
접수번호
0865
발표코드
34P181포 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
발표시간
금 <발표Ⅳ>
발표형식
포스터
발표분야
재료화학
저자 및
공동저자
이병훈, 성명모
한양대학교 화학과,
We report a molecular layer deposition (MLD) of self-assembled organic multilayer for organic thin-film transistor. In the present MLD process, alkylsiloxane self-assembled multilayers (SAMs) were grown under vacuum by repeated sequential adsorptions of C=C-terminated alkylsilane and aluminum hydroxide with ozone activation. The MLD method is a self-controlled layer-by-layer growth process, and is perfectly compatible with the atomic layer deposition (ALD) method. The SAMs films prepared exhibited good mechanical flexibility and stability, excellent insulating properties, and relatively high dielectric capacitances of 374 nF/cm2 with a high dielectric strength of 4 MV/cm. They were then used as a 12 nm-thick dielectric for pentacene-based thin-film transistors (TFTs), which showed a maximum field effect mobility of 0.57 cm2/V s, operating at -4 V with an on/off current ratio of ∼103.

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