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  • 02월 22일 16시 이후 : 초록수정 불가능, 일정확인 및 검색만 가능

Molecular Layer Deposition of Organic-Inorganic Hybrid Film by Alternate Supply of Zr(OC(CH3)3)4 and 7-Octenyltrichlorosilane

등록일
2008년 2월 13일 16시 58분 40초
접수번호
1146
발표코드
34P211포 이곳을 클릭하시면 발표코드에 대한 설명을 보실 수 있습니다.
발표시간
금 <발표Ⅳ>
발표형식
포스터
발표분야
재료화학
저자 및
공동저자
임교근, 이병훈, 성명모
한양대학교 화학과,
Organic-inorganic hybrid films were fabricated by a new growth technique that can control thickness with nanometer level. This method is based on molecular layer deposition of self-assembled monolayers in gas phase. The alkene terminated alkysiloxane self-assembled monolayer was formed by exposing a substrate to C=C terminated alkyltrichlorosilane and water vapor in ALD chamber. The terminal vinyl groups were converted to carboxylic groups with ozone treatment. The highly active zirconium dioxide layer was formed on the carboxylic terminated SAMs by using zirconium tetra-tert-butoxide adsorption followed by exchange reaction of water molecule in order to provide highly active adsorption sites for the anchoring of the next monolayer. The organic-inorganic hybrid film have been investigated by x-ray photoelectron microscopy, transmission electron microscopy (TEM) and digital multi-meter.

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